液态鼓泡气化供应系统
优点:

使用气体(如H2)鼓泡汽化体(如TCS),在恒定的温度和压力下凝结该混合气体,并以特定的浓度供应。

Use gas(e.g:xhydrogen)  babbling system Vaporize Liquid(e.g: TCS), condense this mixed gas at a constant temperature and pressure, and supply at the specified concentration.

应用:

蒸馏法高度纯化High purification by distillation method

实现稳定浓度状态下供应Supply at stable concentration

大幅减少待机时排气Significant reduction of vent  gas at standby

1台PGM可供应3个腔体Supplied to 3 chambers with 1 unit 

产品详情

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